Snelgrove, Matthew ORCID: 0000-0003-0344-1146, McFeely, Caitlin ORCID: 0000-0002-0447-8250, Hughes, Greg ORCID: 0000-0003-1310-8961, Weiland, C., Woicik, J.C., Shiel, Kyle, Mani González, Pierre Giovanni ORCID: 0000-0001-6993-2349, Ornelas, Carlos ORCID: 0000-0002-4229-3038, Solís-Canto, Óscar ORCID: 0000-0002-6972-0714, Cherkaoui, Karim ORCID: 0000-0002-7062-5570, Hurley, Paul K. ORCID: 0000-0001-5137-721X, Yadav, Pravind ORCID: 0000-0002-7267-9142, Morris, Michael A. ORCID: 0000-0001-8756-4068, McGlynn, Enda ORCID: 0000-0002-3412-9035 and O'Connor, Robert ORCID: 0000-0001-5794-6188 (2022) Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration. Microelectronic Engineering, 266 . ISSN 0167-9317